Miniaturized Millimeter-Wave Radar Sensor for High-Accuracy Applications
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资源说明:A highly miniaturized and commercially available
millimeter wave (mmw) radar sensor working in the frequency
range between 121 and 127 GHz is presented in this paper. It can
be used for distance measurements with an accuracy in the singledigit micrometer range. The sensor is based on the frequency
modulated continuous wave (CW) radar principle; however,
CW measurements are also possible due to its versatile design.
An overview of the existing mmw radar sensors is given and the
integrated radar sensor is shown in detail. The radio frequency
part of the radar, which is implemented in SiGe technology, is
described followed by the packaging concept. The radar circuitry
on chip as well as the external antennas is completely integrated
into an 8 mm × 8 mm quad flat no leads package that is
mounted on a low-cost baseband board. The packaging concept
and the complete baseband hardware are explained in detail.
A two-step approach is used for the radar signal evaluation: a
coarse determination of the target position by the evaluation of
the beat frequency combined with an additional determination
of the phase of the signal. This leads to an accuracy within a
single-digit micrometer range. The measurement results prove
that an accuracy of better than ±6 µm can be achieved with the
sensor over a measurement distance of 35 mm
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