Preparation and characterization of in-plane polarized PZT piezoelectric diaphragms - 源码 - 源码 - 免费下载

Preparation and characterization of in-plane polarized PZT piezoelectric diaphragms

文件大小： 848k

源码售价： 10 个金币积分规则积分充值

资源说明：The preparation and characterization of in-plane polarized lead zirconate titanate (PZT) piezoelectric diaphragms for sensors and actuators applications are demonstrated in this letter. The single phase PZT films can be obtained on SiO2-passivated silicon substrates via sol-gel technique, in which PbTiO3 (PT) films are used as seed layers. Al reflective layer is deposited and patterned into concentric interdigitated top electrode by lithographic process, subsequently. The diaphragms are released

部分文件列表（点击文件名可查看文件内容）

					
									本源码包内暂不包含可直接显示的源代码文件，请下载源码包。